Carl Zeiss SMT and ASML authors present a Hyper NA EUV concept at a numerical aperture of at least 0.75
Authors at Carl Zeiss SMT GmbH and ASML Netherlands B.V. present a concept for an EUV scanner with a numerical aperture of at least 0.75, named hyper NA, as a successor to scanners at NA 0.55. The paper is a…